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Optical technique to measure five-degree-of-freedom error motions for a high-speed microspindle
Hiroshi Murakami, Norio Kawagoishi, Eiji Kondo, Akira KodamaVolume:
11
Language:
english
Pages:
6
DOI:
10.1007/s12541-010-0102-4
Date:
December, 2010
File:
PDF, 579 KB
english, 2010