Experimental investigation of an air-bearing displacement...

International Journal of Precision Engineering and Manufacturing 2011 / 08 Vol. 12; Iss. 4

Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures

Kang-Won Lee, Young-Jin Noh, Wei Gao, Yoshikazu Arai, Yuki Shimizu, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai
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Volume:
12
Language:
english
Pages:
8
DOI:
10.1007/s12541-011-0087-7
Date:
August, 2011
File:
PDF, 2.10 MB
english, 2011
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