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Sputter-redeposition method for the fabrication of automatically sealed micro/nanochannel using FIBs
Heung-Bae Kim, Gerhard Hobler, Andreas Steiger, Alois Lugstein, Emmerich Bertagnolli, Elmar Platzgummer, Hans LoeschnerVolume:
12
Language:
english
Pages:
6
DOI:
10.1007/s12541-011-0119-3
Date:
October, 2011
File:
PDF, 713 KB
english, 2011