Suppression of Oxygen Vacancy Defects in sALD-ZnO Films...

Materials 2020 / 09 Vol. 13; Iss. 18

Suppression of Oxygen Vacancy Defects in sALD-ZnO Films Annealed in Different Conditions

Zhao, Ming-Jie, Sun, Zhi-Tao, Zhang, Zhi-Xuan, Geng, Xin-Peng, Wu, Wan-Yu, Lien, Shui-Yang, Zhu, Wen-Zhang
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Volume:
13
Journal:
Materials
DOI:
10.3390/ma13183910
Date:
September, 2020
File:
PDF, 2.93 MB
2020
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