PECVD silicon carbide surface micromachining technology and...

International Journal of Advances in Engineering Sciences and Applied Mathematics 2010 / 06 Vol. 2; Iss. 1-2

PECVD silicon carbide surface micromachining technology and selected MEMS applications

Vijayekumar Rajaraman, Lukasz S. Pakula, Heng Yang, Patrick J. French, Pasqualina M. Sarro
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Volume:
2
Language:
english
Pages:
7
DOI:
10.1007/s12572-010-0020-9
Date:
June, 2010
File:
PDF, 789 KB
english, 2010
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