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Hybrid HIPIMS+MFMS power supply for dual magnetron sputtering systems
Oskirko, V.O., Zakharov, A.N., Pavlov, A.P., Solovyev, Ð.Ð., Semenov, V.A., Rabotkin, S.V.Volume:
181
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109670
Date:
November, 2020
File:
PDF, 4.43 MB
2020