Phase evolution of tantalum nitride and tantalum carbide films with PBII parameters
Zhongwen Li, Le Gu, Guangze Tang, Xinxin Ma, Mingren Sun, Liqin WangVolume:
30
Language:
english
Pages:
4
DOI:
10.1007/s12598-011-0213-9
Date:
April, 2011
File:
PDF, 681 KB
english, 2011