Simulation aided hot zone design for faster growth of CZ silicon mono crystals
Jianwei Cao, Yu Gao, Ying Chen, Guohu Zhang, Minxiu QiuVolume:
30
Language:
english
Pages:
5
DOI:
10.1007/s12598-011-0216-6
Date:
April, 2011
File:
PDF, 535 KB
english, 2011