Anisotropic Etching of Pyramidal Silica Reliefs with Metal...

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Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid

Kirchner, Robert, Neumann, Volker, Winkler, Felix, Strobel, Carsten, Völkel, Sandra, Hiess, André, Kazazis, Dimitrios, Künzelmann, Ulrich, Bartha, Johann Wolfgang
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Journal:
Small
DOI:
10.1002/smll.202002290
Date:
October, 2020
File:
PDF, 1.10 MB
2020
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