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Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid
Kirchner, Robert, Neumann, Volker, Winkler, Felix, Strobel, Carsten, Völkel, Sandra, Hiess, André, Kazazis, Dimitrios, Künzelmann, Ulrich, Bartha, Johann WolfgangJournal:
Small
DOI:
10.1002/smll.202002290
Date:
October, 2020
File:
PDF, 1.10 MB
2020