Aluminum oxide nucleation in the early stages of atomic...

Carbon 2020 / 11 Vol. 169

Aluminum oxide nucleation in the early stages of atomic layer deposition on epitaxial graphene

Schilirò, E., Lo Nigro, R., Panasci, S.E., Gelardi, F.M., Agnello, S., Yakimova, R., Roccaforte, F., Giannazzo, F.
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Volume:
169
Journal:
Carbon
DOI:
10.1016/j.carbon.2020.07.069
Date:
November, 2020
File:
PDF, 3.30 MB
2020
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