Effect of grain size on thin film stress and morphology...

Effect of grain size on thin film stress and morphology using kinetic Monte Carlo simulations

Chason, Eric, Jagtap, Piyush
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Volume:
128
Journal:
Journal of Applied Physics
DOI:
10.1063/5.0023081
Date:
October, 2020
File:
PDF, 2.15 MB
2020
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