Research on ultra-smooth machining technique for...

Research on ultra-smooth machining technique for monocrystalline silicon substrate

Wang, Zhe, Wu, Lingqi, Dun, Aihuan, Fang, Yuanyuan, Song, Li, Zhu, Xiaolei
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Journal:
Journal of Modern Optics
DOI:
10.1080/09500340.2020.1817589
Date:
October, 2020
File:
PDF, 1.59 MB
2020
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