Research on ultra-smooth machining technique for monocrystalline silicon substrate
Wang, Zhe, Wu, Lingqi, Dun, Aihuan, Fang, Yuanyuan, Song, Li, Zhu, XiaoleiJournal:
Journal of Modern Optics
DOI:
10.1080/09500340.2020.1817589
Date:
October, 2020
File:
PDF, 1.59 MB
2020