Effect of the addition of zirconium on the electrical,...

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Vacuum 2020 / 10

Effect of the addition of zirconium on the electrical, optical, and mechanical properties and microstructure of ITO thin films

Li, Ying-Tsung, Chen, Dian-Ting, Han, Chang-Fu, Lin, Jen-Fin
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Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109844
Date:
October, 2020
File:
PDF, 12.23 MB
2020
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