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Plasma-Enhanced Atomic Layer Deposition of Cobalt and Cobalt Nitride: What Controls the Incorporation of Nitrogen?
van Straaten, Gerben, Deckers, Rick, Vos, Martijn F. J., Kessels, Wilhelmus M. M., Creatore, MariadrianaVolume:
124
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.0c04223
Date:
October, 2020
File:
PDF, 1.30 MB
2020