Structural and nanomechanical properties of porous silicon: Cheap substrate for CMOS process industry
Belaroussi, Yasmina, Scheen, Gilles, Saadi, Abdelhalim A., Taibi, Abdelkader, Maafri, Djabar, Nysten, Bernard, Gabouze, Noureddine, Raskin, JeanâPierreJournal:
Surface and Interface Analysis
DOI:
10.1002/sia.6885
Date:
October, 2020
File:
PDF, 1.24 MB
2020