A two-phase non-dominated sorting particle swarm optimization for chip feature design to improve wafer exposure effectiveness
Hsu, Chia-Yu, Chiu, Shih-ChangVolume:
147
Journal:
Computers & Industrial Engineering
DOI:
10.1016/j.cie.2020.106669
Date:
September, 2020
File:
PDF, 2.71 MB
2020