The role of methane in the formation of fullerene-like...

Diamond and Related Materials 2020 / 11 Vol. 109

The role of methane in the formation of fullerene-like nanostructure in amorphous carbon film deposited by reactive magnetron sputtering

Pei, Lulu, Ju, Pengfei, Ji, Li, Li, Hongxuan, Liu, Xiaohong, Xue, Desheng, Zhou, Huidi, Chen, Jianmin
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Volume:
109
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2020.108018
Date:
November, 2020
File:
PDF, 2.82 MB
2020
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