Potential of micrometer-sized graphite as a catalyst for...

Materials Science in Semiconductor Processing 2021 / 01 Vol. 121

Potential of micrometer-sized graphite as a catalyst for chemical etching of silicon

Asoh, Hidetaka, Sekido, Daichi, Hashimoto, Hideki
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Volume:
121
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105327
Date:
January, 2021
File:
PDF, 12.42 MB
2021
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