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Piezoresistive Pressure Sensor using Nanocrystalline Silicon Thin Film on Flexible Substrate
Pandey, Vivek, Mandal, Aparajita, Sisle, Swapnil, Gururajan, M.P., Dusane, R.O.Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112372
Date:
October, 2020
File:
PDF, 3.34 MB
2020