Room temperature sputtered titanium oxynitride thin films:...

Thin Solid Films 2020 / 10 Vol. 711

Room temperature sputtered titanium oxynitride thin films: The influence of oxygen addition

Khwansungnoen, Phalakorn, Chaiyakun, Surasing, Rattana, Tanattha
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Volume:
711
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2020.138269
Date:
October, 2020
File:
PDF, 2.12 MB
2020
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