Scanning electron imaging with vertically aligned carbon nanotube (CNT) based cold cathode electron beam (C-beam)
Lee, Ha Rim, Kim, Da Woon, Hwang, Ok Jung, Cho, Boklae, Park, Kyu ChangVolume:
182
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109696
Date:
December, 2020
File:
PDF, 6.37 MB
2020