Growth of Thin Film Ferroelectric PZT, PHT, and...

Journal of the American Ceramic Society 2020 / 10

Growth of Thin Film Ferroelectric PZT, PHT, and Antiferroelectric PHO from Atomic Layer Deposition Precursors

Strnad, Nicholas A., Hanrahan, Brendan, Potrepka, Daniel M., Pulskamp, Jeffrey S., Phaneuf, Raymond J., Polcawich, Ronald G.
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Journal:
Journal of the American Ceramic Society
DOI:
10.1111/jace.17521
Date:
October, 2020
File:
PDF, 17.85 MB
2020
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