A low-noise readout interface for silicon MEMS vibratory...

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A low-noise readout interface for silicon MEMS vibratory gyroscope

Liu, Xiaowei, Chen, Dongliang, Song, Keguan
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Journal:
Modern Physics Letters B
DOI:
10.1142/S021798492150069X
Date:
October, 2020
File:
PDF, 3.08 MB
2020
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