Study of Dislocations in Homoâ and HeteroâEpitaxially Grown AlN Layers
Goto, Ken, Takekawa, Nao, Nagashima, Toru, Yamamoto, Reo, Pozina, Galia, Dalmau, Rafael, Schlesser, Raoul, Collazo, RamÏn, Monemar, Bo, Sitar, Zlatko, BoÄkowski, MichaÅ, Kumagai, YoshinaoJournal:
physica status solidi (a)
DOI:
10.1002/pssa.202000465
Date:
October, 2020
File:
PDF, 681 KB
2020