The effect of thickness on surface structure of rf...

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Vacuum 2020 / 9

The effect of thickness on surface structure of rf sputtered TiO2 thin films by XPS, SEM/EDS, AFM and SAM

Güzelçimen, Feyza, Tanören, Bükem, Çetinkaya, Çağlar, Kaya, Meltem Dönmez, Efkere, H. İbrahim, Özen, Yunus, Bingöl, Doğukan, Sirkeci, Merve, Kınacı, Barış, Ünlü, M. Burçin, Özçeli
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Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109766
Date:
September, 2020
File:
PDF, 14.45 MB
2020
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