Heat transport properties of alumina gate insulator films...

Heat transport properties of alumina gate insulator films on Ge substrates fabricated by atomic layer deposition

Uchida, Noriyuki, Nakajima, Yuta, Bolotov, Leonid, Chang, Wen-Hsin, Maeda, Tatsuro, Ohishi, Yuji
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Volume:
121
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105396
Date:
January, 2021
File:
PDF, 167 KB
2021
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