Gallium oxide films deposition by RF magnetron sputtering; a detailed analysis on the effects of deposition pressure and sputtering power and annealing
Mobtakeri, Soheil, Akaltun, Yunus, Ãzer, Ali, Kılıç, Merhan, Tüzemen, Ebru Åenadım, Gür, EmreJournal:
Ceramics International
DOI:
10.1016/j.ceramint.2020.08.289
Date:
September, 2020
File:
PDF, 5.31 MB
2020