Plasma treatment to tailor growth and photoelectric...

Surface and Coatings Technology 2020 / 12 Vol. 403

Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films

Xu, Liangge, He, Lili, Yang, Lei, Zhang, Zhibo, Guo, Shuai, Yang, Zhenhuai, Wang, Peng, Geng, Fangjuan, Gao, Gang, Sun, Chunqiang, Ralchenko, Victor, Zhu, Jiaqi
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Volume:
403
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2020.126414
Date:
December, 2020
File:
PDF, 3.26 MB
2020
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