Boron carbide thin films deposited by RF-PECVD and PLD...

Materials Chemistry and Physics 2021 / 01 Vol. 258

Boron carbide thin films deposited by RF-PECVD and PLD technique: A comparative study based on structure, optical properties, and residual stress

Bute, A., Jena, S., Kedia, S., Udupa, D.V., Singh, K., Bhattacharya, D., Modi, M.H., Chand, N., Sinha, S.
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Volume:
258
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2020.123860
Date:
January, 2021
File:
PDF, 4.79 MB
2021
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