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The effect of deposition rate on amorphous forming composition range and resistivity of Al100âxMox alloy films
Wang, Caixia, Wang, Tao, Cao, Linlin, Yu, Shouming, Zhang, GuojunVolume:
713
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2020.138354
Date:
November, 2020
File:
PDF, 2.24 MB
2020