Ferroelectric Switching in Trilayer Al2O3/HfZrOx/Al2O3 Structure
Im, Solyee, Kang, Seung-Youl, Kim, Yeriaron, Kim, Jeong Hun, Im, Jong-Pil, Yoon, Sung-Min, Moon, Seung Eon, Woo, JiyongVolume:
11
Journal:
Micromachines
DOI:
10.3390/mi11100910
Date:
September, 2020
File:
PDF, 3.85 MB
2020