Thin-film encapsulation of Al 2...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 12 Vol. 38; Iss. 6

Thin-film encapsulation of Al 2 O 3 multidensity layer structure prepared by spatial atomic layer deposition

Park, Hyunwoo, Shin, Seokyoon, Choi, Hyeongsu, Lee, Namgue, Choi, Yeongtae, Kim, Keunsik, Jeon, Hyeongtag
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000485
Date:
December, 2020
File:
PDF, 2.49 MB
2020
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