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Correlation between process parameters and electrochemical surface state for electrochemical-mechanical polishing application of copper in acid- and alkali-based electrolyte
Youngkyun Lee, Yong-Jin Seo, Jun-Won Yang, Hyung-Ho Kim, Yeongbong Park, Haedo JeongVolume:
8
Language:
english
Pages:
5
DOI:
10.1007/s13391-011-1000-3
Date:
February, 2012
File:
PDF, 872 KB
english, 2012