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Nonlinear Response of PZT-Actuated Resonant Micromirrors
Frangi, Attilio, Opreni, Andrea, Boni, Nicolo, Fedeli, Patrick, Carminati, Roberto, Merli, Massimiliano, Mendicino, GianlucaYear:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3022557
File:
PDF, 2.54 MB
2020