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Computational Characterization of Microwave Planar Cutoff Probes for Non-Invasive Electron Density Measurement in Low-Temperature Plasma: Ring- and Bar-Type Cutoff Probes
Kim, Si Jun, Lee, Jang Jae, Lee, Young Seok, Yeom, Hee Jung, Lee, Hyo Chang, Kim, Jung-Hyung, You, Shin JaeVolume:
10
Journal:
Applied Sciences
DOI:
10.3390/app10207066
Date:
October, 2020
File:
PDF, 3.47 MB
2020