Effect of Sputtering Current on the Structure of TiCrN Thin...

Applied Mechanics and Materials 2020 / 8 Vol. 901

Effect of Sputtering Current on the Structure of TiCrN Thin Films Prepared from Mosaic Target by Reactive DC Magnetron Sputtering

Alaksanasuwan, Siriwat, Buranawong, Adisorn, Witit-Anun, Nirun
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Volume:
901
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.901.37
Date:
August, 2020
File:
PDF, 1.61 MB
2020
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