Porosity calibration in a 4-layer porous silicon structure to fabricate a micro-resonator with well-defined refractive indices and dedicated to biosensing applications
Cassio, F., Lorrain, N., Pirasteh, P., Poffo, L., Lemaitre, J., Hardy, I., Guendouz, M.Volume:
110
Journal:
Optical Materials
DOI:
10.1016/j.optmat.2020.110468
Date:
December, 2020
File:
PDF, 8.79 MB
2020