Computationally efficient model for viscous damping in...

Sensors and Actuators A: Physical 2020 / 10 Vol. 314

Computationally efficient model for viscous damping in perforated MEMS structures

Kaczynski, Jaroslaw, Ranacher, Christian, Fleury, Clement
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Volume:
314
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112201
Date:
October, 2020
File:
PDF, 714 KB
2020
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