Numerical Modelling of Non-Linearities in MEMS Resonators

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Journal of Microelectromechanical Systems 2020

Numerical Modelling of Non-Linearities in MEMS Resonators

Zega, Valentina, Gattere, Gabriele, Koppaka, Saisneha, Alter, Anne, Vukasin, Gabrielle D., Frangi, Attilio, Kenny, Thomas W.
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Year:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3026085
File:
PDF, 2.81 MB
2020
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