Performance Characterization of Micromachined Inductive Suspensions Based on 3D Wire-Bonded Microcoils
Lu, Zhiqiu, Poletkin, Kirill, Wallrabe, Ulrike, Badilita, VladVolume:
5
Journal:
Micromachines
DOI:
10.3390/mi5041469
Date:
December, 2014
File:
PDF, 8.78 MB
2014