A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation
Sánchez-Chiva, Josep Maria, Valle, Juan, Fernández, Daniel, Madrenas, JordiVolume:
20
Journal:
Sensors
DOI:
10.3390/s20205899
Date:
October, 2020
File:
PDF, 8.61 MB
2020