tert -butoxides as precursors for atomic...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 12 Vol. 38; Iss. 6

tert -butoxides as precursors for atomic layer deposition of alkali metal containing thin films

Sønsteby, Henrik H., Bratvold, Jon E., Killi, Veronica A.-L. K., Choudhury, Devika, Elam, Jeffrey W., Fjellvåg, Helmer, Nilsen, Ola
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000589
Date:
December, 2020
File:
PDF, 4.71 MB
2020
Conversion to is in progress
Conversion to is failed