Structural and physical characteristics of sputter deposited zirconium nitride thin films by sputtering at various time in Ar-N2 atmosphere
Gharib, Mahshad, Eshraghi, Mohamad Javad, Bordbari, MahdiJournal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-020-04664-1
Date:
October, 2020
File:
PDF, 2.72 MB
2020