Multilayered Cu–Ti deposition on silicon substrates for...

Phosphorus Sulfur and Silicon and the Related Elements 2020 / 11 Vol. 195; Iss. 11

Multilayered Cu–Ti deposition on silicon substrates for chemiresistor applications

Torrisi, A., Horák, P., Vacík, J., Cannavò, A., Ceccio, G., Vaniš, J., Yatskiv, R., Grym, J.
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Volume:
195
Journal:
Phosphorus, Sulfur, and Silicon and the Related Elements
DOI:
10.1080/10426507.2020.1804166
Date:
November, 2020
File:
PDF, 1.34 MB
2020
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