Digital process support in toolmaking by using optical...

IOP Conference Series Materials Science and Engineering 2019 / 11 Vol. 651

Digital process support in toolmaking by using optical metrology

Essig, Peter, Liewald, Mathias, Bolay, Christian, Schubert, Thomas
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Volume:
651
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/651/1/012026
Date:
November, 2019
File:
PDF, 844 KB
2019
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