Tradeoff Control of Multi-exposure Lithography for SU-8 Photochemical Reaction Channel Formation
Chen, Qi-Ming, Zhou, Jin-Yun, Hu, Yi-Ming, Zheng, QiJournal:
BioChip Journal
DOI:
10.1007/s13206-020-4405-y
Date:
October, 2020
File:
PDF, 6.45 MB
2020