Science and Technology of Integrated Super-High Dielectric Constant AlOx/TiOy Nanolaminates / Diamond for MOS Capacitors and MOSFETs
Liu, Jiangwei, Auciello, Orlando, de Obaldia, Elida, Da, Bo, Koide, YasuoVolume:
172
Journal:
Carbon
DOI:
10.1016/j.carbon.2020.10.031
Date:
February, 2021
File:
PDF, 1.90 MB
2021