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Ab initio study for molecular-scale adsorption, decomposition and desorption on AlN surfaces during MOCVD growth
An, Jiadai, Dai, Xianying, Guo, Runqiu, Feng, Lansheng, Zhao, TianlongVolume:
10
Journal:
Scientific Reports
DOI:
10.1038/s41598-020-72973-w
Date:
December, 2020
File:
PDF, 1.37 MB
2020