SPICE-Based Multiphysics Model to Analyze the Dynamics of Ferroelectric Negative-CapacitanceâElectrostatic MEMS Hybrid Actuators
Raman, Raghuram Tattamangalam, Ajoy, ArvindVolume:
67
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2020.3019991
Date:
November, 2020
File:
PDF, 1.55 MB
2020