Electrical Characteristics of LDD and LDD-Free FinFET...

IEEE Journal of the Electron Devices Society 2020 Vol. 8

Electrical Characteristics of LDD and LDD-Free FinFET Devices of Dimension Compatible With 14 nm Technology Node

Du, Yuchen, Hassan, Md Khaled, Zhao, Ri-an, Wan, Xinggong, Joshi, Manoj
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Volume:
8
Year:
2020
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/jeds.2020.3026993
File:
PDF, 1.48 MB
2020
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